1.XY方向扫描范围90um×90um,Z方向扫描范围10um,XY全范围运动最大高度起伏低于4nm;
X-Y axis scanning range 90um×90um,Z-axis scanning range 10um, XY scanning maximum height variation is lower than 4nm;
2.智能自动进针方式;
Auto probe;
3.210mm真空吸附全自动样品台,可程序化控制;
210mm auto specimen stage with vacuum absorption;
4.配置接触模式、轻敲模式、相位成像模式、压电响应测试模式、横向力/摩擦力测试模式、扫描隧道显微镜、智能扫描模式;
Scanning mode: Contact mode, Tapping mode, Phaseimaging, Piezo Response Force Modulation (PFM), Lateral Force Microscopy (LFM), Scanning Tunneling Microscopy (STM), ScanAsyst mode;
5.样品台:210mm真空吸附全自动样品台,可程序化控制;
210mm auto specimen stage with vacuum adsorption;
6.导电AFM:通过测量电流对导体的导电性及完整性的变化进行成像;
Conductive Atomic Force microscopy: imaging of conductivity difference by testing specimen current can check the integrality of conductor material;
7.可实现程序控制的纳米刻蚀功能,工业标准的C++编译软件;
Provide nanofabrication process, the industry standard C++ software;
8.提供-35℃至250℃成像功能。
Provide -35℃ to 250℃ imaging.